Abstract
In this paper, He’s variational iteration method (VIM) is used to analyze the deflection of poly silicon diaphragm of Micro Electro Mechanical Systems (MEMS) capacitive microphone. The residual stresses in the material used to make the diaphragm change the vibrational characteristics of the microphone diaphragm and consequently influence the microphone’s first resonant frequency, cutoff frequency and sensitivity. The most successful devices use poly silicon as a diaphragm material, because of its residual stress is controllable by high-temperature annealing after ion implantation by boron or phosphorous. External acoustic force causes to deflect the diaphragm of the structure and VIM is a powerful analytical method to predict the structural behavior and the microphone performance. Comparison of this new method with the previous approximate solution [1], is applied to assure us about the accuracy of solution.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
