Abstract
According to the perturbation in lithography positioning control system, a novel gain scheduled PID controller using a root mean square (RMS) signal is proposed. Perturbation is also referred as the stage hunting, and the positioning control system will be very weak against small disturbances such as electrical noise or even structural vibration of the building in which the stage is installed. The gain scheduled PID controller is used to minimize the stage hunting and simultaneously maximize the immunity to disturbances. Simulations results verify the effectiveness of the gain scheduled PID controller for the positioning control in the lithography stage, as compared with the traditional PID controller.
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