Abstract
Several kinds of ferrite‐integrated on‐chip inductors are presented. Ferrite nanomaterial applied in RF on‐chip inductors is prepared and analyzed to show the properties of high permeability, high ferromagnetic resonance frequency, high resistivity, and low loss, which has the potential that will improve the performance of RF on‐chip inductors. Simulations of different coil and ferrite nanomaterial parameters, inductor structures, and surrounding structures are also conducted to achieve the trend of gains of inductance and quality factor of on‐chip inductors. By integrating the prepared ferrite magnetic nanomaterial to the on‐chip inductors with different structures, the measurement performances show an obvious improvement even in GHz frequency range. In addition, the studies of CMOS compatible process to integrate the nanomaterial promote the widespread application of magnetic nanomaterial in RF on‐chip inductors.
Highlights
For decades the RF on-chip inductors have a large occupation of chip area and low Q factor [1,2,3,4], it hindered the realization of high-performance RF circuits and systems
The single layer on-chip inductor shows good improvement when integrated with ferrite nanomaterial
The ferrite nanomaterial is proposed for the application of RF range on-chip inductor to solve the problem of poor Q and large area
Summary
For decades the RF on-chip inductors have a large occupation of chip area and low Q factor [1,2,3,4], it hindered the realization of high-performance RF circuits and systems. There is an increasing demand for small-sized and high-performance RF on-chip inductors in CMOS circuits and systems. To improve the Q-factor, suspension and solenoid structure [6,7,8,9], thick insulating layer [10], grounded shield [11, 12], and high resistivity substrate structure [2, 13] are applied to reduce the substrate loss; coils made by high conductivity metal [14, 15] and low k interlayer dielectric [16] are applied to reduce the resistive loss; multilayer inductors are applied to reduce the area occupation [17, 18]. All the previosely mentioned works cannot both satisfy the demands of small size and high Q factor at the same time.
Sign-in/Register to view highlights & summary Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
