Abstract
The influence of the internal gettering process on the large-scale defects in Czochralski-grown boron-doped single-crystal silicon is investigated by low-angle mid-infrared light scattering. The large-scale defects in the as-grown material and crystals subjected to the internal gettering procedure are classified. The applicability of low-angle light scattering in laboratory investigations and in the industrial inspection of the operations in an internal gettering production cycle is demonstrated.
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