Abstract
Dry-pumped systems using various combinations of ion, titanium sublimation, and cryogenic pumping are now widely accepted in vacuum processes utilizing pressures below 5×10−5 Torr. High-capacity, dry-pumped systems have now been proven which operate at much higher pressures. This paper discusses the design of these high-capacity, dry-pumped systems for evaporation and melting and refining processes. A variety of titanium evaporation pumping systems—using wire, rod, and ingot-feed systems, with large titanium inventories for continuous operation—are discussed. A high-throughput titanium sublimation pumping system is described, along with its high-pressure operating characteristics, which offers more economical pumping for large gas loads. Conventional inert gas pumping systems are described for use with these high-throughput titanium sublimation systems, to meet particular requirements.
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