Application of Chemometrics into Time-of-Flight Secondary Ion Mass Spectrometry (TOF-SIMS) Data Analysis

Abstract

Analysis of time-of-flight secondary ion mass spectrometry (TOF-SIMS) data is crucial for interpreting extremely intricate TOF-SIMS data of complex samples such as biological tissues and intelligent devices. Combination of imaging analysis and spectrum analysis is powerful to extract unknown important components and to identify specific materials. In this article, principles of three important data analysis techniques for TOF-SIMS data, principal component analysis (PCA), multivariate curve resolution (MCR) and G-SIMS, are briefly introduced. And, examples of their applications to TOF-SIMS data are also shown and discussed.