Abstract
This paper presents a study of a vacuum gauge with a sensitive element based on an array of carbon nanotubes. In the course of the study, a plasma chemical vapor deposition method was used, which allows one to obtain oriented CNT arrays on various substrates. A feature of this method is the use of catalytic centers. A model for calculating the parameters of the formed emission structure is constructed. The corresponding current-voltage characteristics are built. The results obtained during the study show that the vacuum gauge has a sensitivity of the order of 2.4·10−8 A/Pa, a speed of 4 seconds, at U = 20 V, and an energy consumption of 1.5 · 10−7 W.
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