Application of capacitance techniques in sensor design

Abstract

By reconsidering the basic principles of capacitance, and also clarifying some of the misconceptions about the principles of guarding, which were correctly described by Kelvin more than a century ago, it is shown how guarded multi terminal capacitor geometries can be designed, analytically precalculated and correctly measured using simplified transformer bridge systems with phase-sensitive detection. An overview is given of the archetypal multi terminal capacitor configurations as well as ways to modify them for practical sensor designs. Detrimental side-effects are discussed and rules for practical designs are given. The possibilities for combining bridge circuits with simultaneous and sequential measurements of complex sensors are described. Expectations for future developments, partly based on silicon microfabrication techniques, are discussed and a comparison of the major aspects of capacitive sensors with resistive strain gauges and inductive sensors is given.