Abstract
A factor analysis of Auger line shapes selected from a compositional depth profile can determine the presence and number of new chemical states formed at a solid interface. A technique known as target transformation is used to extract the Auger spectrum of an unidentified interfacial component from mixed spectra. Quantitative information is also provided by factor analysis and target transformation. The procedures described in this work are superior to other methods of interpreting Auger line shape and depth profile data, such as visual inspection, spectral stripping or peak area measurements. Auger line shape analysis was used to study the sputter deposition of Pt onto a zirconia ceramic. Under some sputtering conditions, a platinum–zirconium intermetallic is formed at the solid interface.
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