Abstract
The method is proposed for determining the microhardness of thin coatings by scratching. Atomic force microscopy was applied to determine the scratch width and the optimal load on the indenter. Combined coatings 4 μm thick based on Ti, Cr, Mo2N, and alloy ZrHf obtained by the combination of electric-arc evaporation and ion nitridizing were studied. The combined coatings are shown to have better micromechanical characteristics compared to the nitride coatings deposited by the electric-arc evaporation of these refractory metals and alloys.
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