Abstract
A computer-controlled, tuned Langmuir probe system has been designed and implemented for the diagnostic study of analytical, radio frequency (r.f.) glow discharge sources. Use of an impedance-tuned probe eliminates deleterious effects created by the capacitive character of the r.f. plasma-induced probe sheath. Results indicate that r.f.-induced distortion of the probe characteristic does exist, but can be effectively mitigated by the use of the tuned probe. An automated Langmuir probe acquisition and processing system for the r.f. glow discharge plasma is developed to obtain complete and undistorted current-voltage ( i- V) curves over a wide potential range (± 100 V) with typical curves generated in less than 1 1 2 min , though acquisition time can be less than 1 s. Various Langmuir probe theories are reviewed and evaluated for their suitability in the characterization of these plasmas. Evidence indicates that the collisionless theories can be effectively employed to evaluate the obtained i- V curves and to derive the parameters of electron temperature, electron average energy, electron density and ion density.
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