Abstract
Application of a High-Resolution Spectrometer in a Broadband Optical Monitor for Film Coating Yun-Fei Wu, Qing-Yuan Cai, Yu-Xiang Zheng, Rong-Jun Zhang and Liang-Yao Chen State Key Laboratory for Advanced Photonic Materials and Devices, Department of Optical Science and Engineering, Fudan University, Shanghai 200433, China (Received 21 October 2007) The broadband optical monitoring (BOM) method for the thinlm coating process has become more popular due to its having a higher e ciency than other methods and the ability to precisely control the lm coating process at any thickness. A high-resolution spectrometer working in the broadband spectral range has to be used for the BOM method to monitor the growth process of a narrow bandpass thinlm lter. In this paper, we show the application of a high-resolution spectrometer in BOM for the narrow bandpass thinlm lter-coating process and a way to eliminate e ectively the interference error of the substrate. We also describe an experimental setup that can be used to grow a narrow bandpass lter in a real BOM process. PACS numbers: 42.15.Eq, 42.87.-d, 42.62.Cf
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