Application of a diffraction grating and position sensitive detectors to the measurement of error motion and angular indexing of an indexing table

Abstract

In this paper, two systems for the measurement of the error motion and angular indexing of a rotary indexing table have been developed. A laser diode, a laser holder and a position sensitive detector (PSD) are integrated as a simple measuring device for the measurement of the rotary error without using a precision reference artifact (a cylinder or a sphere), multiple probes or error separation methods. The laser diode is assembled in the laser holder and fixed on the rotary table. The PSD is set up above the laser holder to detect the position of an incident laser beam from the laser diode. When the rotary table rotates, the rotary error changes the direction of the incident beam and also the position of the spot on the PSD. For the measurement of the angular indexing, a reflective diffraction grating and two PSDs are integrated as a high-resolution angle measuring device without using an autocollimator or a laser interferometer system. The diffraction grating is set at the center of the rotary table and reflects an incident laser beam into several diffractive rays. Two PSDs were set up for detecting the positions of ±1st-order diffraction rays. A simple algebraic method is used to solve the angular indexing through an optical analysis. The experimental results showed the feasibility of the proposed test devices.