Abstract
A multilayer sensory structures of conjugated polymers - porous silicon has been created. The influence of water molecules adsorption on high frequency (1 MHz) conductivity and capacity of hybrid structures based on porous silicon has been studied. It is registered essential changing the electrical conductivity and capacity as functions of humidity. For estimation of sensor properties of the structures it is calculated the adsorption sensitivity of hybrid structures. It is revealed the formation of photosensitive electrical barriers in hybrid structure poly(3,4-ethylenedioxythiophene) - porous silicon, whose parameters are largely dependent on the surrounding gas atmosphere. The obtained results make it possible to optimize the fabrication of selective sensors based on porous silicon. The obtained results make it possible to optimize the fabrication of highly sensitive and selective gas sensors based on porous silicon.
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