Abstract
Plasma chemical process for organic thin film formation was known as plasma polymerization. The process was outlined and characteristics of the films were introduced. Two kinds of polymer stractures were formed by plasma polymerization. Crosslinked polymers were formed from the most organic vapours in any kinds of reactors because monomers were highly dissociated in the high energy plasma. However functional polymers were also formed under the regulation of plasma using the monomers which were elements of functional polymers. Among several applications of the process, plasma polymerized resist formation and lithography processes were introduced.
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