Applicability of Macroscopic Transport Models to Decananometer MOSFETs

Abstract

We perform a comparative study of various macroscopic transport models against multisubband Monte Carlo (MC) device simulations for decananometer MOSFETs in an ultra-thin body double-gate realization. The transport parameters of the macroscopic models are taken from homogeneous subband MC simulations, thereby implicitly taking surface roughness and quantization effects into account. Our results demonstrate that the drift-diffusion (DD) model predicts accurate drain currents down to channel lengths of about 40 nm but fails to predict the transit frequency below 80 nm. The energy-transport (ET) model, on the other hand, gives good drain currents and transit frequencies down to 80 nm, whereas below 80 nm, the error rapidly increases. The six moments model follows the results of MC simulations down to 30 nm and outperforms the DD and the ET models.