Abstract
An apparatus to measure inelastic low-energy electron diffraction (ILEED) and energy- and angular-dependent secondary electron emission, (EADSEE), is described. The apparatus can measure EADSEE for incident beam energies of up to 200 eV and ILEED for beam energies up to 50 eV, with energy and angular resolutions of about 0.15 eV and 1.5°, respectively. General design criteria are discussed, and detail is provided where a little-known technique has been employed.
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