Abstract
Apertureless Scanning Near-field Optical Microscope (SNOM) receives an increasing interest in local imaging and analysis. We report a hybrid microscope composed of a commercial Atomic Force Microscope (AFM) and an apertureless SNOM, which operates both in reflection and transmission modes with several illumination and collec- tion systems. The optical probe is a commercial AFM tip integrated on a silicon cantilever. The AFM is operated in the intermittent contact mode at the resonance frequency of the cantilever. We present the images obtained on a grating of cylindrical dots of aluminum (diameter is 200 nm, height is 20 nm) and we show the effects of some optical param- eters (polarization, direction of illumination and collection) on the SNOM images. © 1998 Society of Photo-Optical Instrumentation Engineers. (S0091-3286(98)02507-0)
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