Abstract

Method for automatic optical inspection system with periodic comparison and logic operation can obtain defect point information.Because of the existence of minimal cycle comparison of Pitch decimal,we cannot get the correct comparison.The use of two points formed one line,we can construct a linear equation to simulate the original breakpoints into continuous points.Just then,whether the comparative distance is an integer,the corresponding effect is found in the gray value.Using this method to improve the accuracy of anomaly check,the adverse effect is avoided on the yield,quality and cost of the product,which has the vital significance.

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