Antimicrobial effects by silver–indium–tantalum oxide thin film in visible light

Abstract

This study focuses on the antimicrobial effects in silver-indium-tantalum oxide (Ag–InTaO) thin films. A stack of alternated layers of Ag (7 ​nm), In2O3 (14 ​nm) and Ta2O5 (10 ​nm) was sequentially deposited by sputtering. Then this as-deposited stack of films was rapidly annealed at three selected temperatures 700, 800 or 900 ​°C for 5 ​min to allow the formation of complex oxides. Results from material characterization indicate that annealing help to form complex oxides, intermetallic compounds and Ag particles on the top surface. These features lead to the improved antimicrobial effect against E. Coli. under visible light by Ag–InTaO.