Abstract
The crosstalk and flexibility are two problems in three-dimensional force sensor with sandwich structure. In this paper, a piezoresistive flexible three-dimensional force sensor is presented. It consists of three parts: the bump layer, the pressure sensitive layer and the flexible electrode layer. The three-dimensional force sensor has several independent pressure units isolated by PDMS and single-layer electrode structure. This kind of structure not only can suppress the crosstalk, but also has better flexibility. The three-dimensional force is measured by each layer cooperated. The measuring principle and preparation method of the three-dimensional force are studied here. It shows that the anti-crosstalk piezoresistive three-dimensional force sensor is realizable in the field of intelligent perception such as dexterous robot hand.
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