Abstract
This paper details study of the anti-symmetric response to the symmetrical electrostatic excitation of a Micro-electro-mechanical-systems (MEMS) resonant mass sensor. Under higher order mode excitation, two nonlinear coupled flexural modes to describe MEMS mass sensors are obtained by using Hamilton’s principle and Galerkin method. Static analysis is introduced to investigate the effect of added mass on the natural frequency of the resonant sensor. Then, the perturbation method is applied to determine the response and stability of the system for small amplitude vibration. Through bifurcation analysis, the physical conditions of the anti-symmetric mode vibration are obtained. The corresponding stability analysis is carried out. Results show that the added mass can change the bifurcation behaviors of the anti-symmetric mode and affect the voltage and frequency of the bifurcation jump point. Typically, we propose a mass parameter identification method based on the dynamic jump motion of the anti-symmetric mode. Numerical studies are introduced to verify the validity of mass detection method. Finally, the influence of physical parameters on the sensitivity of mass sensor is analyzed. It is found that the DC voltage and mass adsorption position are critical to the sensitivity of the sensor. The results of this paper can be potentially useful in nonlinear mass sensors.
Highlights
Clamped microbeam is a common resonant element in Micro-electro-mechanical-systems (MEMS) sensors [1,2,3]. Due to their great potential and unique characteristics, microbeam resonant sensors have the advantages of small, fast, high sensitivity [4,5]
The structure nonlinearity and nonlinear electrostatic force seriously affect the performance of conventional micro-mass sensor [8,9,10]
We study the effect of added mass on anti-symmetric mode vibration and utilize the dynamic jump motion of anti-symmetric mode to propose a new mass detection method
Summary
Clamped microbeam is a common resonant element in Micro-electro-mechanical-systems (MEMS) sensors [1,2,3]. With the reduction of size, there are obvious nonlinear effects and complex bifurcation behaviors [31], which seriously affect the dynamic mechanical characteristics and mass detection performance of the sensor. The dynamic behavior near the bifurcation point is disturbed by the ambient noise, which affects the stability of the sensor It can be concluded from the above analysis that mode coupled vibration can induce anti-symmetric modes and improve the performance of resonators, which may be beneficial to improve the accuracy and sensitivity of mass sensors [36,37,38]. To the best of our knowledge, there are fewer quantitative results about a general analysis of nonlinear mass sensors by using anti-symmetric mode vibration. The second and third modes of the micro-mass sensor in COMSOL
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