Abstract
A method to avoid the stiction failure in nano-electro-opto-mechanical systems has been demonstrated by coating the system with an anti-stiction layer of Al2O3 grown by atomic layer deposition techniques. The device based on a double-membrane photonic crystal cavity can be reversibly operated from the pull-in back to its release status. This enables to electrically switch the wavelength of a mode over ~50 nm with a potential modulation frequency above 2 MHz. These results pave the way to reliable nano-mechanical sensors and optical switches.
Highlights
Nano-opto-electro-mechanical-systems (NOEMS) represent an attractive platform to build a novel class of reconfigurable photonic devices such as tunable filters, optical accelerometers, spectrometers, switches and adaptive waveguides [1]
A method to avoid the stiction failure in nano-electro-opto-mechanical systems has been demonstrated by coating the system with an anti-stiction layer of Al2O3 grown by atomic layer deposition techniques
The device based on a double-membrane photonic crystal cavity can be reversibly operated from the pull-in back to its release status
Summary
Nano-opto-electro-mechanical-systems (NOEMS) represent an attractive platform to build a novel class of reconfigurable photonic devices such as tunable filters, optical accelerometers, spectrometers, switches and adaptive waveguides [1]. Their combination with photonic crystals (PhC) allows the control of the frequencies of optical modes without introducing additional losses [2]. The latter can adhere permanently due to shortrange interactions that include van der Waals and capillary forces For these reasons, pull-in and stiction failure has represented one of the major drawbacks in the use of MEMS and NEMS for real-life applications. Besides allowing the reliable recovery from pull-in, this enables the use of the device as a switch between two widely different optical/mechanical states
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