Abstract
In microelectromechanical-system (MEMS) structures, selective encapsulation with an organic dielectric using electrodeposition can prevent sticking. Selective electrodeposition characteristics were investigated on a gold surface using sulfonium cations with epoxy groups as a source material. We observed an incubation period in the initial stage of the deposition. X-ray photoelectron spectroscopy revealed that the cause of the incubation period is the removal of oxygen adsorbed on the gold surface. Applying this technique to the encapsulation of MEMS structures confirmed the anti-sticking effect between an actuator and a gold electrode selectively coated with an organic dielectric.
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