Abstract
VAlTiCrMo-based high-entropy alloy coatings with BCC structure were successfully prepared by magnetron sputtering, and the tribological properties were improved by changing Mo content. It is revealed that friction force changed the composition of lubricating phase in the oxide scale of VAlTiCrMo1.6 coating, that is, a complex oxide Al2(MoO4)3 as dominant lubricating phase was formed on the surface of oxide scale through tribochemical reaction between simple oxides. And the phase separation in the layered oxide scale caused by thermal diffusion, which is favorable to form continuous lubricating film during friction, was the prerequisite for VAlTiCrMo1.6 coating to acquire low friction and wear. In this process, the addition of Mo played a key role in uphill diffusion and segregation of elements.
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