Abstract
A new route to use silane chemistry as a means of improving anti-sticking properties of Ni stamps for nanoimprint lithography was developed. The surfaces and the corresponding anti-sticking properties for the coatings of a fluorinated silane on three different oxidized surfaces on Ni, namely oxidized Ni, oxidized Ti on Ni, and SiO 2 on Ni, were investigated using atomic/lateral force microscopy, contact angle measurement, X-ray photoelectron spectroscopy, and imprint tests. The surface energies and the friction constants for the silane coatings are found to be in the order NiO/Ni > TiO 2/Ni > SiO 2/Ni, indicating that an introduction of a SiO 2 interlayer is most effective to achieve a better anti-adhesive coating. This is also supported by simultaneous imprint tests with sinusoidal gratings of different coatings, where no failure appears for the coating with a SiO 2 interlayer.
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