Abstract
A superfluid \(^3\)He film with a thickness of 1.25 \(\upmu \)m was studied using a microelectromechanical oscillator at various pressures of 9.2, 18.2, 25.2, and 28.6 bars. The oscillator was driven in the linear damping regime where the damping coefficient is independent of the velocity of the oscillator. The resonance frequency shows weak temperature and pressure dependences in the low temperature limit. An inertia coefficient of \(\approx \)0.1 was obtained in the ballistic regime. When the temperature rose from the lowest temperature, the resonance frequency of the resonator exhibited an unusual behavior, a rapid increase beyond the intrinsic value as temperature increases, for 9.2 and 18.2 bars.
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