Abstract
In this work, we report the experimental observation of quality factor (Q) variation in piezoresistively sensed silicon micromechanical resonators vibrating in a lateral contour mode. By fine tuning the bias current, the gradual descending and ascending trend of Q is distinctively observable. It shows a drastic drop in Q by nearly one order of magnitude (from 105 to 104) at a certain bias current level. The observed Q variation is replicable even when applying a capacitive sensing configuration with bias current running through. This anomaly is consistently detected from multiple die samples including resonators aligned along both and crystal orientations in the (100) plane. A detailed quantitative study is currently underway.
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