Abstract
We have proposed a fabrication process of intrinsic Josephson junctions (IJJs) using AFM lithography and successfully obtained IJJs in YBaCuO thin films deposited by MOCVD. A sample shows clear hysteresis and 23 voltage steps related to IJJs in the I- V curve. The maximum width of a step is about 2 mV at 5 K. We discuss the I– V characteristics and estimate the order of the parameters for the IJJ.
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