Abstract
The water content of barrier layer anodic alumina films was measured using the ion probe mass spectrometer: a method of sputtered ion mass analysis. Film thicknesses ranged from 100 to 2000Aå, with the oxides left intact on the basis metal during the analysis. The analytical procedure was first calibrated against standard samples of aluminum trihydroxides and monohydroxides. Then data were obtained for different thicknesses of boric‐acid‐anodized barrier layer oxides. The various aspects of the fragmentation patterns that were obtained are suggestive of a trihydroxide composition. Representative spectra are included, to illustrate the use of this method of surface analysis.
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