Anodic formation of low-aspect-ratio porous alumina films for metal-oxide sensor application

Abstract

Thin nanoporous anodic alumina films, of low aspect ratio (1:1), with two distinctive pore sizes and morphologies were prepared by two-step constant-current anodising of aluminium layers on SiO 2/Si substrates in 0.4 mol dm −3 tartaric (TA) and malonic acid (MA) electrolytes and then modified by open-circuit dissolution. The anodic films were employed as a support material for sputtering-deposition of thin WO 3 layers in view of exploiting their gas sensing properties. The films and deposits were characterized by scanning electron microscopy, X-ray diffraction and electric resistance measurements at fixed temperatures in the range of 100–300 °C upon NH 3 and CO gas exposures. Test sensors prepared from the annealed and stabilized alumina-supported WO 3 active layers were insensitive to CO but showed considerably enhanced responses to NH 3 at 300 °C, the sensitivity depending upon the anodic film nature, the pore size and the surface morphology. The increased sensor sensitivity is due to the substantially enlarged film surface area of the TA-supported WO 3 films and the nanostructured, camomile-like morphology of the MA-supported WO 3 films. Sensing mechanisms in the alumina-supported WO 3 active layers are discussed.