Abstract
Anodic bonding experiments of Pyrex glass and Kovar alloy have been carried out in this investigation. By means of SEM and EDS, microstructures and chemical elements in the joining interfaces were analyzed. With XRD, phase structures in the interfaces were also analyzed. The results show that the joint is made up of three different layers, which are Kovar alloy layer, transition layer and Pyrex glass layer. The transition layer are spinal oxides, which are FeO·SiO2. By means of MARC software, residual stresses and strains were investigated for the anodic bonding samples of Pyrex glass/Kovar alloy. The maximum residual stress located in the transition layer and the maximum strain located in the Kovar alloy layer. Residual stresses and strains of the sample are significant small and uniform.
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