Anode mode in cathodic arc deposition apparatus with various cathodes and ambient gases

Abstract

The anode mode of a vacuum arc in a cathodic arc deposition apparatus was observed as a function of ambient gas pressure ranging from 0.01 to 300 Pa. The chamber (400 mm in diameter and 600 mm in length) made of stainless steel (SUS304) acted as the anode. The arc was operated at a relatively low constant current of 50 A. The cathode materials used were Al, Ti, Fe, Ni, and Cu, and ambient gases were He, Ne, Ar, H 2, N 2, O 2, and CH 4. The principal results are as follows. (1) As the pressure was increased, the anode mode changed from diffuse-arc to footpoint to plane luminous to anode-spot mode. (2) The anode mode and resultant arc voltage increase were strongly dependent on gas species, and weakly on the cathode material. (3) Comparing diatomic and polyatomic (H 2, N 2, O 2, and CH 4) with mono-atomic molecule gases (He, Ne, and Ar), the onset pressure of the anode mode transition in the former was lower, the arc voltage higher, and the footpoints more numerous, smaller, and clearer. Both the dependence of the ambient pressure and the influence of the cathode materials and gas species on the anode mode changes were explained by the ion deficiency theory.