Abstract
In this study we propose an annular-beam dual-detection confocal reflectance microscopy (ADDCRM) method for high-speed three-dimensional surface measurements without longitudinal mechanical translation. ADDCRM can measure the axial position of a sample surface using the axial response curve ratio of two photodetectors, each with a different diameter pinhole. Since the height measurement range is limited by the full-width at half-maximum of the ratio curve, an annular beam is used to extend the depth range without reducing the lateral resolution. The experimental results demonstrate that ADDCRM achieves high-speed surface profiling with a doubled-height measuring range compared to conventional Gaussian beams.
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