Annealing studies of TiC and (Ti, V)C structures prepared by activated reactive evaporation

Abstract

Films of TiC and (Ti, V)C solid solutions which had been deposited by the activated reactive evaporation process were annealed in an ultrahigh vacuum transmission electron microscope. Recrystallization of the deposit occured at 1000 °C, with the result that the microstructure transformed from fibrous grain bundles to a structure consisting of equiaxed grains of diameter 100 Å. The grain size was stabilized by an ultrafine network of cavities which were part of the original microstructure deposited at lower temperatures. The presence of a Ti 3O phase after annealing at 1000 °C was also observed.