Abstract
Single crystals of magnesium oxide were implanted with 150 keV krypton ions at room temperature. Fluences ranged between 5 × 1014 and 5 × 1015 ions cm−2 using a dose rate of approximately 1013 ions cm−2s−1. Samples were isochronally annealed in vacuum at temperatures of 400, 600, 800 and 1000°C. Damage depth profiles were determined before and after each annealing cycle by α-particle channeling using a backscattering geometry. Relative defect densities were obtained from aligned spectra by numerical integration of the dechanneling rate equation. The experimental results confirm a mixed damage structure, which probably consists of randomly disordered regions and extended defects. Complete annealing of these two components occurs at temperatures above 600 and 800°C respectively.
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