Abstract
Thin films of BaTiO3 have been deposited on quartz substrates by the excimer laser ablation method. The effects of substrate temperature, oxygen pressure and post-deposition annealing were investigated. At substrate temperatures above 300°C, randomly oriented crystalline BaTiO3 films with a tetragonal structure were obtained, and the crystallinity was independent of oxygen pressure during the deposition. The film with a-axis preferred orientation perpendicular to the substrate surface was obtained by annealing at 1000°C for 60 minutes.
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