Abstract
Semiconducting Mg2Si films were synthesized on silicon (111) substrates by magnetron sputtering deposition and subsequent annealing in an annealing furnace filled with argon gas, and the effects of heat treatment on the formation and microstructure of Mg2Si films were investigated. The structural and morphological properties were investigated by X-ray diffraction (XRD) and scanning electron microscopy (SEM), respectively. The results show that the crystal quality of Mg2Si films depends strongly on the annealing temperature, the annealing time and the deposited magnesium film thickness. Annealing at 400 °C for 5 h is optimal for the preparation of Mg2Si film. XRD and SEM results show that magnesium silicide film with various orientations is formed on the silicon surface because of the interdiffusion and reaction of magnesium with substrate silicon atoms, and the evolution of surface features on growing films is very dependent on the annealing temperature and time.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
