Abstract
AbstractResults on the investigation of the magnetic properties and microstructure of the as‐deposited and annealed at T = 200‐700 °C Fe‐Zr‐N films are presented. The Fe‐Zr‐N films with the 0.7‐µm thickness were deposited by RF sputtering onto glass square substrates. Structural properties of the films were studied by means of the X‐ray diffraction technique. The bulk magnetic characteristics of the films have been measured by a vibrating sample magnetometer (VSM). The study of the near‐surface magnetic properties of the Fe‐Zr‐N samples was carried out employing magneto‐optical micromagnetometer with a surface sensitivity of about 20 nm of the thickness depth. The strong annealing effect on the values of the coercivity HC and the saturation field HS of the films was revealed. The values of HC and HS of the films, annealed at T = 450 and 500 °C, were found to be minimal. The temperature dependences of HC and HS were explained by microstructure changes of the studied films after their post‐deposition heat treatment. (© 2008 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)
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