Abstract
The crystallographic anisotropy of the lateral selective thermal oxidation of AlGaAs alloys is experimentally studied. The anisotropic behavior of this oxidation process, used primarily for building a lateral confinement in vertical surface emitting lasers (VCSEL), is quantified by varying different process parameters and the geometrical shapes of laterally oxidized mesa structures. This experimental study aims to have a better control of the oxide aperture shape used in oxide-confined photonics devices.
Highlights
In many different AlGaAs-based photonic and optical devices, the selective oxidation of an Al-rich layer is a very efficient way to create a lateral electrical and optical confinement
The anisotropic behavior of this oxidation process, used primarily for building a lateral confinement in vertical surface emitting lasers (VCSEL), is quantified by varying different process parameters and the geometrical shapes of laterally oxidized mesa structures. This experimental study aims to have a better control of the oxide aperture shape used in oxide-confined photonics devices
The authors thank AET Technologies for technical assistance on the oxidation process
Summary
In many different AlGaAs-based photonic and optical devices, the selective oxidation of an Al-rich layer is a very efficient way to create a lateral electrical and optical confinement. Should the oxidation of the AlGaAs confinement layer be finely controlled in all the lateral directions, one could use an anisotropic shape of the oxide aperture to impose a polarizationstable emission. This has been practically achieved by oxidizing through etched holes appropriately located around the final aperture [6]. Some modelling works have considered the non-cylindrical oxide confinement, showing the incidences on the modal properties [8,9,10] All these demonstrations, which reveal the strong importance of controlling the shapes of the area confined by the lateral oxidation, have been done by adapting the initial geometry of the etched pattern from which the lateral oxidation expands. We explore the influence of the process parameters to establish the conditions which can lead to a more isotropic behavior
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