Abstract
Various high-aspect structures fabricated from macroporous silicon with an ordered lattice by additional treatment in anisotropic etchants are considered. The conditions and specific features of the fabrication of structures with walls formed by a single type of slow-etched (110) or (100) planes and the dependence of their porosity and specific internal surface area on the wall thickness are determined. Zigzag, grid-like, and pillar-shaped structures fabricated on the basis of macroporous silicon by anisotropic treatment in aqueous KOH solutions are experimentally demonstrated.
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