Abstract
Research on heat conduction in periodic nanoporous silicon films has drawn much attention due to its importance for developing highly efficient thermoelectric devices. Here, the thermal transport in two-dimensional (2D) periodic silicon nanoporous films is studied by a phonon Monte Carlo (MC) method and the theoretical analyses based on the Boltzmann transport equation (BTE). It is found that both the cross-plane and the in-plane effective thermal conductivities are significantly reduced when compared to those in the diffusive limit, and decrease with the increasing porosity or the decreasing period length. Importantly, our work reveals a strong anisotropy of the effective thermal conductivity of the 2D periodic nanoporous films; that is, the effective thermal conductivity in the in-plane direction is significantly less than that in the cross-plane direction, due to the anisotropic effects of material removal and pore boundary scattering. Interestingly, even the influence of the specular parameter that de...
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