Abstract
A new apparatus to utilize the directional nature of ion-beam sputter deposition is presented. Employment of an angular setting slit together with translational substrate scanning enables large-area deposition, keeping the angular settings unchanged. The merits of this apparatus were demonstrated step by step on a typical example: CdTe obliquely deposited films known for the anomolous photovoltaic effect.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.