Abstract
This article describes an angular quantification method of planar distortion for polydimethylsiloxane (PDMS) stamps in soft lithography by introducing angular parameter θ that is proportional to patterns’ planar distortion in magnitude. The average planar distortion of individual pattern (absolute distortion, θ 1) and pattern-to-pattern distortion (relative distortion, θ 2) of PDMS stamps were determined by angular discrepancies ( θ). The angular quantification was evaluated among four different PDMS stamps affixation treatments, and the PDMS stamps supported on silane-modified glass showed strong binding and minimal planar distortion. Its absolute angular distortion θ 1 was 3.98×10 −3 and relative angular distortion θ 2 was 1.22×10 −3. The angular evaluations demonstrate a versatile method for quantifying and comparing planar distortions among patterns as well as screening elastomer stamps support in soft lithography.
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