Angular distribution of species in pulsed electron beam deposition of BaxSr1-xTiO3

Abstract

The angular thickness and composition profiles of thin films obtained by irradiating a BaxSr1-xTiO3 (x = 0.2) target with a pulsed electron beam were investigated by Rutherford backscattering spectrometry for argon and oxygen background gases at a pressure of about 10-2 mbar. A “semi-sphere” holder was used, resulting in a fixed target to substrate distance of about 40 mm. The film thickness profiles have forward shaped peaks, with measurable thickness up to 80-90° for major axis and 25° for minor axis, and presents similar trend for both argon and oxygen background gas. The analysis of the congruent transfer of the elements from the target as a function of the angle showed that the film composition is not uniform over this wide angular range and differs with respect of the ablated target depending on the element used and on background gas.