Abstract
The angular distributions of elemental composition of films prepared by laser ablation of perovskite oxide SrZrO3 have been investigated using electron probe microanalysis with wavelength-dispersive spectroscopy. Each constituent element showed two modal distribution composed of a broad cosmθ (m=2–3) distribution and a sharp cosnθ (n=8–23) distribution. Oxygen showed a broader distribution than that of Sr and Zr. At the polar angle close to surface normal direction (polar angle <12°), Zr concentration was higher than that of Sr in vacuum whereas in oxygen-containing atmosphere their concentrations were about the same. Below oxygen pressure of 1.3Pa, Sr and Zr concentration increased and decreased with the increase in polar angle, respectively, whereas in oxygen partial pressure of 10Pa, both elements showed no angular dependences. Broadening of angular distribution of all the elements was observed when deposition was performed under oxygen partial pressure of 10Pa, which is considered to be caused by collisional scatterings of more than ten times with ambient gas molecules.
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