Abstract
In our recent work the IMFP of electrons has been determined by elastic peak electron spectroscopy. The probability of electron elastic backscattering on solid surfaces has been measured by CMA and RFA conventional spectrometers. In this paper the angular distribution of elastically backscattered electrons is taken into consideration. Tabulated differential elastic scattering cross-sections of Fink, Riley, Reimer and those obtained with our Thomas-Fermi-Dirac approach are used. Their angular distributions are similar below Z<15 atomic number. For higher Z elements, angular corrections are necessary. Calculated angular distributions on Be, Al, Cu, Ag and Au are similar to Bronshtein's experimental curves. Experimental IMFP data are presented using angular corrections for evaluating Seiler's experimental (RFA) results on Al, Fe, V, Cu, Ag, Ta, W and Au. Our CMA measurements on the same elements resulted in reasonable agreement with other reported IMFP data. The procedure proved to be useful in the 0.5–3 keV kinetic energy range. For the high Z elements like Ta, W and Au discrepancies occur which can be explained by multiple elastic scattering, being determined by the total elastic scattering cross-sections.
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