Abstract
It is a key for improving the performance of SiC MOSFET to clarify SiO2/SiC interface structure formed by thermal oxidation. We have investigated the initial stage of thermal oxidation on 4H-SiC (0001) on-axis and 4° off-axis substrates using angle-resolved photoelectron spectroscopy. The changes of the Si 2p3/2 and C 1s photoelectron spectra show that the off-axis has an influence on the chemical bonding state of SiO2/SiC. On the other hand, there isn't difference in the oxidation rate between on-axis 4H-SiC(0001) and 4° off-axis 4H-SiC(0001).
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