Abstract

We analyze the possibility of determining the surface excitation parameter (SEP) from the dependence of the elastic backscattering signal intensity on the emission angle. It has been found that the shape of this dependence is reasonably well described by the theoretical model implemented in a typical Monte Carlo simulation strategy. As shown recently, the mean percentage deviation between the experimental angular dependence and the theoretical dependence is equal to 8.82% at 200 eV, 6.28% at 500 eV and 4.69% at 1000 eV. In the theoretical model used, the surface energy losses were ignored. Close inspection of the deviations between theory and experiments indicates systematic trends that can be ascribed to the surface energy losses. We found here that taking into the account the surface energy losses further improves the agreement between theory and experiment. The total mean percentage deviation, equal to 6.65%, decreases to 5.59% if the mathematical form of the Chen formula for SEP is used, or to 5.16% if the Oswald expression is used. The material dependent coefficients in the expression of SEP derived from the emission angle dependence of the elastic peak intensity differ from these coefficients resulting from other methods. We conclude that the determination of SEP from shape of the angular dependence requires the experimental data of high quality, and the reliable theoretical model describing elastic electron backscattering.

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