Abstract
Scanning system is often considered as the most important part for 3D laser vision sensor. In this paper, we propose a method for the optical system design of angle extended linear MEMS scanning system, which has features of huge scanning degree, small beam divergence angle and small spot size for 3D laser vision sensor. The principle of design and theoretical formulas are derived strictly. With the help of software ZEMAX, a linear scanning optical system based on MEMS has been designed. Results show that the designed system can extend scanning angle from ±8° to ±26.5° with a divergence angle small than 3.5mr, and the spot size is reduced for 4.545 times.
Sign-in/Register to access full text options 
Free) 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
